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After-sales Service: | Yes |
Color: | Grey |
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Items
|
Values/Scope
|
Substrate
|
Si
|
Wafer diameter
|
4" / 6" / 8"
|
Epi-layer thickness
|
4-5 μm
|
Wafer bow
|
<30 μm, Typical
|
Surface Morphology
|
RMS<0.5nm in 5×5 μm²
|
Barrier
|
AlXGa1-XN, 0
|
Cap layer
|
In-situ SiN or GaN (D-mode); p-GaN (E-mode)
|
2DEG density
|
>9E12/cm2 (20nm Al0.25GaN)
|
>9E12/cm2 (20nm Al0.25GaN)
|
1800 cm2/Vs (20nm Al0.25GaN)
|
Items
|
Values/Scope
|
Substrate
|
HR_Si / SiC
|
Wafer diameter
|
4''/6'' for SiC, 4"/ 6"/ 8" for HR_Si
|
Epi-layer thickness
|
2-3 μm
|
Wafer bow
|
<30 μm, Typical
|
Surface Morphology
|
RMS<0.5nm in 5×5 μm²
|
Barrier
|
AlGaN or AlN or InAlN
|
AlGaN or AlN or InAlN
|
In-situ SiN or GaN
|